TARUI Hisaki | New Materials R. C., SANYO Electric Co., Ltd.
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概要
New Materials R. C., SANYO Electric Co., Ltd. | 論文
- A Photon Energy Supply for Micromachines -Development of a High-Voltage Photovoltaic Micro-Device-
- Development of High Voltage Photovoltaic Micro-Devices for Driving Micro Actuators (Special Issue on Micromachine Technology)
- Enlargement of Poly-Si Film Grain Size by Excimer Laser Annealing and Its Application to High-Performance Poly-Si Thin Film Transistor
- Low Temperature Fabrication of ZrN Thin Film using an Ion Beam and Application to a VCR Cylinder