Khajornrungruang Panart | Dept. of Mechanical Engineering and Systems, Osaka University
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- Dept. of Mechanical Engineering and Systems, Osaka Universityの論文著者
Dept. of Mechanical Engineering and Systems, Osaka University | 論文
- On-Machine Tool Measurement for Cutting-Edge Profile of Micro Endmill using Laser Diffraction(Nano/micro measurement and intelligent instrument)
- 122 Laser Diffraction Edge Profile Method of Micro Cutting Tool for On-machine Measurement
- 125 Study on Particle Detection for Patterned Wafers by Evanescent Light Illumination : Evanescent Light Scattering Simulation by means of FDTD Method