Kudou Kazuhisa | NTT Advanced Technology Corporation, Atsugi, Kanagawa 243-0124, Japan
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- Kudou Kazuhisaの詳細を見る
- 同名の論文著者
- NTT Advanced Technology Corporation, Atsugi, Kanagawa 243-0124, Japanの論文著者
NTT Advanced Technology Corporation, Atsugi, Kanagawa 243-0124, Japan | 論文
- Monolithic Integration Fabrication Process of Thermoelectric and Vibrational Devices for Microelectromechanical System Power Generator
- Removal of Gold Oxide by Low-Temperature Hydrogen Annealing for Microelectromechanical System Device Fabrication
- Novel Sensor Structure and Its Evaluation for Integrated Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer
- Novel Sensor Structure and Its Evaluation for Integrated Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer