Marumoto Kenji | Advanced Technology R&D Center, Mitsubishi Electric Corporation,
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概要
Advanced Technology R&D Center, Mitsubishi Electric Corporation, | 論文
- An Evaluation of High Acceleration Voltage Electron Beam Writing on X-Ray Masks
- A Principle of Deposition of Ultra Low and Uniform Stress Absorber for X-Ray Mask
- Stress Stability of W-Ti X-Ray Absorber in Patterning Process
- A Principle of Deposition of Ultra Low and Uniform Stress Absorber for X-Ray Mask
- Significant Effects of As Ion Implantation on Si-selective Epitaxy by Ultrahigh Vacuum Chemical Vapor Deposition