NOHDA Tomoyuki | SANYO Electric Co. Ltd., Microelectronics Res. Cent.
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概要
SANYO Electric Co. Ltd., Microelectronics Res. Cent. | 論文
- Lateral Solid-Phase Recrystallization from the Crystal Seed Selectively Formed by Excimer Laser Annealing in Ge-Ion-Implanted Amorphous Silicon Films
- Lateral Solid Phase Recrystallization from the Crystal Seed in Ge-Ion-Implanted Amorphous Silicon Films by Repetition Rapid Thermal Annealing