Kawakubo Masanori | Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan
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概要
- Kawakubo Masanoriの詳細を見る
- 同名の論文著者
- Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japanの論文著者
関連著者
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Yamada Yohei
Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan
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Kawakubo Masanori
Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan
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Kurokawa Syuhei
Department Of Intelligent Machinery And Systems Kyushu University
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Konishi Nobuhiro
Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan
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Doi Toshiro
Department of Intelligent Machinery and Systems, Faculty of Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
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Doi Toshiro
Department of Education, Saitama University, 255 Shimo-Okubo, Sakura-ku, Saitama 338-8570, Japan
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Hirai Osamu
Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan
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Kadomura Kazunori
Semiconductor Group, A.L.M.T. Corporation, Osaka 550-0003, Japan
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Kawakubo Masanori
Micro Device Division, Hitachi, Ltd., Ome, Tokyo 198-8512, Japan
著作論文
- Frictional Characterization of Chemical–Mechanical Polishing Pad Surface and Diamond Conditioner Wear
- Diamond Conditioner Microwear Effect on Pad Surface Height Distribution in Tungsten Chemical Mechanical Polishing