SUZUKI Isamu | Mitsubishi Materials Silicon Co., Ltd., Evaluation Technology Department

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概要

関連著者

Miyairi Hiroo
Mitsubishi Materials Silicon Co. Ltd. Evaluation Technology Department
SUZUKI Isamu
Mitsubishi Materials Silicon Co., Ltd., Evaluation Technology Department
HORIOKA Yukichi
Mitsubishi Materials Silicon Co., Ltd., Evaluation Technology Department
MIYAIRI Hiroo
Mitsubishi Materials Silicon Co., Ltd., Evaluation Technology Department

著作論文

Quick and Quantitative Measurement of Oxygen Precipitates near Denuded Zone in Intrinsic-Gettering-Treated Czochralski-Si Wafers

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