Ishii Hidekazu | University of Tohoku, New Industry Creation Hatchery Center (NICHe)
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概要
University of Tohoku, New Industry Creation Hatchery Center (NICHe) | 論文
- Adsorption Behavior of Various Fluorocarbon Gases on Silicon Wafer Surface
- Adsorption Behavior of Various Fluorocarbon Gases on the Silicon Wafer Surface