Tada Tetsuya | MIRAI, Advanced Semiconductor Research Center (ASRC)
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概要
MIRAI, Advanced Semiconductor Research Center (ASRC) | 論文
- Formation of Mesoporous Pure Silica Zeolite Film
- Characterization of pore sealing effect on trench sidewalls in porous low-k films by vapor adsorption in-situ spectroscopic ellipsometry
- Characterization of Pore Size Distributions in Ultralow-k Films