Mohamad Zulfakri | Graduate School of Engineering, Gunma University, Kiryu, Gunma 376-8515, Japan

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概要

関連著者

HOSAKA Sumio
Graduate school of Engineering, Gunma University
Komori Takuya
Graduate School Ofengineering Tokai University
Zhang Hui
Graduate School of Engineering, Gunma University, Kiryu, Gunma 376-8515, Japan
Yin You
Graduate School of Engineering, Gunma University, Kiryu, Gunma 376-8515, Japan
Akahane Takashi
Graduate School of Engineering, Gunma University, Kiryu, Gunma 376-8515, Japan
Mohamad Zulfakri
Graduate School of Engineering, Gunma University, Kiryu, Gunma 376-8515, Japan
Komori Takuya
Graduate School of Engineering, Gunma University, Kiryu, Gunma 376-8515, Japan

著作論文

Electron Beam Lithography of 15\times 15 nm2 Pitched Nanodot Arrays with a Size of Less than 10 nm Using High Development Contrast Salty Developer

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