Ahn Se-Jin | Graduate School of Mechanical Engineering, Pusan National University

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Graduate School of Mechanical Engineering, Pusan National University | 論文

• Observability Analysis Techniques on Inertial Navigation Systems
• Prediction of Real Contact Area from Microtopography on CMP Pad
• Experimental Investigation of Material Removal Characteristics in Silicon Chemical Mechanical Polishing
• Effect of Process Parameters on Particle Removal Efficiency in Poly(vinyl alcohol) Brush Scrubber Cleaning
• Chemical Mechanical Planarization Method for Thick Copper Films of Micro-Electro-Mechanical Systems and Integrated Circuits

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