Kato Yasuo | Mask Drawing Equipment Development Department, Nuflare Technology Inc., 8 Shinsugita, Isogo-ku, Yokohama 235-0032, Japan
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概要
- Kato Yasuoの詳細を見る
- 同名の論文著者
- Mask Drawing Equipment Development Department, Nuflare Technology Inc., 8 Shinsugita, Isogo-ku, Yokohama 235-0032, Japanの論文著者
関連著者
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Abe Takayuki
Marketing Department, Nuflare Technology Inc., Shin-Yokohama, Kohoku, Yokohama 222-0033, Japan
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Abe Takayuki
Marketing Department, Nuflare Technology Inc., 3-2-6 Shin-Yokohama, Kohoku-ku, Yokohama 222-0033, Japan
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Shibata Hayato
Mask Drawing Equipment Development Department, Nuflare Technology Inc., 8 Shinsugita, Isogo-ku, Yokohama 235-0032, Japan
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Yashima Jun
Mask Drawing Equipment Development Department, Nuflare Technology Inc., 8 Shinsugita, Isogo-ku, Yokohama 235-0032, Japan
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Kato Yasuo
Mask Drawing Equipment Development Department, Nuflare Technology Inc., 8 Shinsugita, Isogo-ku, Yokohama 235-0032, Japan
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Abe Takayuki
Marketing Department, Nuflare Technology, Inc., Shin-Yokohama, Kohoku-ku, Yokohama 222-0033, Japan
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Matsumoto Hiroshi
EB Mask Equipment Engineering Department, Nuflare Technology Inc., 2068-3 Ooka, Numazu, Shizuoka 410-8510, Japan
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Iijima Tomohiro
EB Mask Equipment Engineering Department, Nuflare Technology Inc., 2068-3 Ooka, Numazu, Shizuoka 410-8510, Japan
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Matsumoto Hiroshi
Mask Lithography Engineering Department, Nuflare Technology, Inc., Numazu, Shizuoka 410-8510, Japan
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Motosugi Tomoo
Mask Lithography Engineering Department, Nuflare Technology, Inc., Numazu, Shizuoka 410-8510, Japan
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Ohnishi Takayuki
Mask Lithography Engineering Department, Nuflare Technology, Inc., Numazu, Shizuoka 410-8510, Japan
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Iijima Tomohiro
Mask Lithography Engineering Department, Nuflare Technology, Inc., Numazu, Shizuoka 410-8510, Japan
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Anze Hirohito
Mask Lithography Engineering Department, Nuflare Technology, Inc., Numazu, Shizuoka 410-8510, Japan
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Shibata Hayato
Mask Lithography Engineering Department, Nuflare Technology, Inc., Shinsugita, Isogo-ku, Yokohama 235-0032, Japan
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Kato Yasuo
Mask Lithography Engineering Department, Nuflare Technology, Inc., Shinsugita, Isogo-ku, Yokohama 235-0032, Japan
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Anze Hirohito
Mask Drawing Equipment Development Department, Nuflare Technology, Inc., Yokohama 222-0033, Japan
著作論文
- Proximity Effect Correction for Mask Writing Taking Resist Development Processes into Account
- High Accuracy Correction of Critical Dimension Errors Appearing in Large Scale Integrated Circuits Fabrication Processes: Pattern-Based Model