FUJITA Masahiko | Kofu, Operation of Semiconductor and Integrated Circuits Division, Hitachi Ltd.
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概要
Kofu, Operation of Semiconductor and Integrated Circuits Division, Hitachi Ltd. | 論文
- Excellence of Gate Oxide Integrity in Metal-Oxide-Semiconductor Large-Scale-Integrated Circuits Based on P^-/P^- Thin-Film Epitaxial Silicon Wafers
- Dependence of Warpage of Czochralski-Grown Silicon Wafers on Oxygen Concentration and Its Application to MOS Image-Sensor Device