Gao Shan | Institute of Microelectronics, ASTAR (Agency for Science, Technology and Research), 11 Science Park Road, Singapore 117685

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概要

関連著者

Li Hong
Institute Of Immunological Science Hokkaido University
Tan Chuan
Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798
Gao Shan
Institute of Microelectronics, ASTAR (Agency for Science, Technology and Research), 11 Science Park Road, Singapore 117685
Li Hong
Institute of Microelectronics, ASTAR (Agency for Science, Technology and Research), 11 Science Park Road, Singapore 117685
Zhang Lin
Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798
Lim Dau
Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798

著作論文

Through Silicon Via Fabrication with Low-\kappa Dielectric Liner and Its Implications on Parasitic Capacitance and Leakage Current

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