Yanase Yoshio | Research and Development Center, Sitix Division, Sumitomo Metal Industries Ltd.
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概要
Research and Development Center, Sitix Division, Sumitomo Metal Industries Ltd. | 論文
- Dependence of Grown-in Defect Behavior on Oxygen Concentration in Czoehralski Silicon Crystals
- Atomic force Microscope Observation of the Change in Shape and Subsequent Disappearance of "Crystal-Originated Particles" after Hydrogen-Atmosphere Thermal Annealing
- A New Method for Transmission Electron Microscope Observation of Grown-in Defects in As-Grown Czochralski Silicon (111) Crystals