Ohnuma Hidetoshi | Process Development Department, Semiconductor Company, Sony Corporation
スポンサーリンク
概要
Process Development Department, Semiconductor Company, Sony Corporation | 論文
- Lithography Computer Aided Design Technology for Embedded Memory in Logic
- Simulation-Based Automatic Optical Proximity Effect Correction Adaptive for Device Fabrication
- Practical Optical Proximity Effect Correction Adopting Process Latitude Consideration
- New Systematic Evaluation Method for Attenuated Phase-Shifting Mask Specifications
- Evaluation of Phase-Shifting Masks for Dense Contact Holes Using the Exposure-Defocus and Mask Fabrication Latitude Methodology