Shioya Yoshimi | Nanomaterial Laboratory Co., Ltd., 1-3-7-905 Minamiyamata, Tsuzuki-ku, Yokohama 224-0029, Japan

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概要

• Shioya Yoshimiの詳細を見る
• 同名の論文著者
• Nanomaterial Laboratory Co., Ltd., 1-3-7-905 Minamiyamata, Tsuzuki-ku, Yokohama 224-0029, Japanの論文著者

関連著者

• Takagi Hideki

  National Inst. Of Advanced Industrial Sci. And Technol.

• Kokubun Yasuo

  Yokohama National Univ. Yokohama Jpn

• Maeda Ryutaro

  National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn

• Shioya Yoshimi

  Nanomaterial Laboratory Co., Ltd., 1-3-7-905 Minamiyamata, Tsuzuki-ku, Yokohama 224-0029, Japan

• Kokubun Yasuo

  Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan

著作論文

• Analysis of Stress in Plasma Enhanced Chemical Vapor Deposition Silicon Nitride Film Irradiated with Ultraviolet Light

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