Su Wang-Shen | National Nano Device Laboratory, Hsinchu 30013, Taiwan

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概要

関連著者

Su Wang-Shen
National Nano Device Laboratory, Hsinchu 30013, Taiwan
Fang Weileun
Department of Power Mechanical Engineering, National Tsing Hua Uninersity, Hsinchu, Taiwan 300, R.O.C.
Fang Weileun
Department of Power Mechanical Engineering, National Tsing-Hua University, Hsinchu 30013, Taiwan
Huang Hsin-Yu
Department of Power Mechanical Engineering, National Tsing-Hua University, Hsinchu 30013, Taiwan

著作論文

Modification of the Mechanical Properties of SiO2 Thin Film Using Plasma Treatments for Micro-Electro-Mechanical Systems Applications

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