Satoh Masataka | Research Center of Ion Beam Technology and College of Engineering, Hosei University

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• 同名の論文著者
• Research Center of Ion Beam Technology and College of Engineering, Hosei Universityの論文著者

Research Center of Ion Beam Technology and College of Engineering, Hosei University | 論文

• Electrical Properties of N Ion Implanted Layer in (11^^00)-Oriented 6H-SiC
• Rapid Oxidation of SiC Using Microwave-Discharged O_2 Plasma at Low Temperatures (< 300℃) : Semiconductors

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