Kang Sungchil | Department of Control and Instrumentation Engineering, Korea University, Jochiwon, Chungnam 339-700, Republic of Korea
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概要
- Kang Sungchilの詳細を見る
- 同名の論文著者
- Department of Control and Instrumentation Engineering, Korea University, Jochiwon, Chungnam 339-700, Republic of Koreaの論文著者
関連著者
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Kwon Kwang-ho
Department Of Electronic Engineering Hanseo University
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Efremov Alexander
Department of Electronic Devices and Materials Technology, State University of Chemistry and Technology, 153000 Ivanovo, Russia
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Jang Hanbyeol
Department of Control and Instrumentation Engineering, Korea University, Yeongi, Chungnam 339-700, Korea
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Kang Sungchil
Department of Control and Instrumentation Engineering, Korea University, Jochiwon, Chungnam 339-700, Republic of Korea
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KWON Kwang-Ho
Department of Control and Instrumentation Engineering, Korea University
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Yun Sun
University of Science and Technology and Electronics and Telecommunications Research Institute, Daejon 305-350, Republic of Korea
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Kim Kwangsoo
Department of Electronic Engineering, Sogang University, Seoul 121-742, Korea
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Kang Sungchil
Department of Control and Instrumentation Engineering, Korea University, Yeongi, Chungnam 339-700, Korea
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Yang Hyungjin
Department of Physics, Korea University, Yeongi, Chungnam 339-700, Korea
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Kim Daehee
Department of Control and Instrumentation Engineering, Korea University, Jochiwon, Chungnam 339-700, Republic of Korea
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Kwon Kwang-Ho
Department of Control and Instrumentation Engineering, Korea University, Jochiwon, Chungnam 339-700, Republic of Korea
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Kwon Kwang-Ho
Department of Control and Instrumentation Engineering, Korea University, Yeongi, Chungnam 339-700, Korea
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KIM Kwangsoo
Department of Electronic Engineering, Sogang University
著作論文
- Etching Characteristics and Mechanisms of TiO2 Thin Films in HBr/Cl2/Ar Inductively Coupled Plasma
- Etching Behavior and Mechanism of In- and Ga-Doped ZnO Thin Films in Inductively Coupled BCl3/Cl2/Ar Plasmas