CHOI Chang | Department of Materials Engineering, Sungkyunkwan University
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概要
Department of Materials Engineering, Sungkyunkwan University | 論文
- Effect of N_2O to C_4F_8/O_2 on Global Warming during Silicon Nitride Plasma Enhanced Chemical Vapor Deposition (PECVD) Chamber Cleaning Using a Remote Inductively Coupled Plasma Source : Nuclear Science, Plasmas, and Electric Discharges
- C_4F_8O/O_2/N-based Additive Gases for Silicon Nitride Plasma Enhanced Chemical Vapor Deposition Chamber Cleaning with Low Global Warming Potentials
- Ultrastructural Analysis of Electrofused Protoplasts from Pansy and Wild Viola by Scanning Electron Microscopy
- Impaired repair ability of hsp70.1 KO mouse after UVB irradiation
- Tectono-metamorphic evolution of the Okcheon Metamorphic Belt, South Korea : Tectonic implications in East Asia