GIGA Process | LG Semicon Co., Ltd

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概要

• 同名の論文著者
• LG Semicon Co., Ltdの論文著者

関連著者

• Lee Seong-dae

  Millimeter-wave Innovation Technology Research Center(mint) Dongguk University

• Park Jin-won

  Giga Process Team Lg Semicon Co. Ltd.

• Park Jin

  Memory R&d Division Hyundai Electronics Industries Co. Ltd.

• Nam So-young

  Giga Process Team Lg Semicon Co. Ltd.

• Lee Sang-Do

  GIGA Process Team, LG Semicon Co., Ltd.

• Ha Jae-Hee

  GIGA Process Team, LG Semicon Co., Ltd.

• Ha Jae-hee

  Giga Process Team Lg Semicon Co. Ltd.

• Lee Sang-do

  Giga Process Team Lg Semicon Co. Ltd.

• GIGA Process

  LG Semicon Co., Ltd

• Giga Process

  Lg Semicon Co. Ltd

著作論文

• The study on the sidewall films formed during Si trench etching in Cl_2/HBr based plasmas

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