Nam So-young | Giga Process Team Lg Semicon Co. Ltd.
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概要
関連著者
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Lee Seong-dae
Millimeter-wave Innovation Technology Research Center(mint) Dongguk University
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Park Jin-won
Giga Process Team Lg Semicon Co. Ltd.
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Park Jin
Memory R&d Division Hyundai Electronics Industries Co. Ltd.
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Nam So-young
Giga Process Team Lg Semicon Co. Ltd.
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Lee Sang-Do
GIGA Process Team, LG Semicon Co., Ltd.
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Ha Jae-Hee
GIGA Process Team, LG Semicon Co., Ltd.
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Ha Jae-hee
Giga Process Team Lg Semicon Co. Ltd.
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Lee Sang-do
Giga Process Team Lg Semicon Co. Ltd.
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GIGA Process
LG Semicon Co., Ltd
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Giga Process
Lg Semicon Co. Ltd
著作論文
- The study on the sidewall films formed during Si trench etching in Cl_2/HBr based plasmas
- The study on the sidewall films formed during Si trench etching in Cl_2/HBr based plasmas
- The study on the sidewall films formed during Si trench etching in Cl_2/HBr based plasmas