Yoshigoe Akitaka | Japan Atomic Energy Agency Hyogo Jpn
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概要
Japan Atomic Energy Agency Hyogo Jpn | 論文
- Atomic Layer Fluorination of Highly Oriented Pyrolytic Graphite using Hyperthermal Atomic Fluorine Beam
- Oxidation of Si(001) with a hyperthermal O-atom beam at room temperature: Suboxide distribution and residual order structure