Ohe K. | Department Of Systems Engineering Nagoya Institute Of Technology
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概要
関連著者
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Ohe K.
Department Of Systems Engineering Nagoya Institute Of Technology
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Kimura T.
Department of Cardiology Kokura Memorial Hospital
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KAGA K.
Department of Systems Engineering, Nagoya Institute of Technology
著作論文
- Axial Profile of Charged Particles in Ar/CF_4 RF CCP Plasmas
- Principle and application of a thermal probe to reactive plasmas