Yamakawa H | Research & Development Division Ulvac Japan Ltd.
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概要
Research & Development Division Ulvac Japan Ltd. | 論文
- Aluminum Film Deposition Using an Ultrahigh-Vacuurm Sputtering System
- Charge Exchange Ion Energy Distribution at the RF Electrode in a Plasma Etching Chamber
- Ion Energy Analysis through rf-Electrode
- Development and Plasma Characteristics Measurement of Planar-Type Magnetic Neutral Loop Discharge Etcher
- Enzymatic Degradation of Poly(ε-caprolactone) Fibers in vitro