Pelletier J | Laboratoire De Physique Et Chimie Des Procedes Plasma Universite Joseph Fourier (grenoble 1) Unite C
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- Laboratoire De Physique Et Chimie Des Procedes Plasma Universite Joseph Fourier (grenoble 1) Unite Cの論文著者
Laboratoire De Physique Et Chimie Des Procedes Plasma Universite Joseph Fourier (grenoble 1) Unite C | 論文
- Development of Polymers in O_2 Plasmas: Temperature Effects and Transition to Imperfect Anisotropy
- Comparison of Dry Development Techniques using O_2 and SO_2/O_2 Low-Pressure Plasmas
- S_2Br_2, S_2Cl_2, S_2F_2: A New Line of Halogen-Containing Gases for Low-Pressure Plasma Etching Processes