Zhang Z. | G. W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology

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概要

• 同名の論文著者
• G. W. Woodruff School of Mechanical Engineering, Georgia Institute of Technologyの論文著者

関連著者

• Gu L.

  Department Of Operative Dentistry And Endodontics Guanghua School Of Stomatology Sun Yatsen Universi

• Fu C.

  G. W. Woodruff School Of Mechanical Engineering Georgia Institute Of Technology

• Niess J.

  Mattson Technology

• Timans P.

  Mattson Technology

• Zhang Z.

  G. W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology

著作論文

• TED-AJ03-587 MODELING THE TEMPERATURE AND STRESS OF THE WAFER AROUND THE SUPPORT PIN DURING RAPID THERMAL PROCESSING

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