Kameyama S | Chiba Univ. Chiba Jpn

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概要

関連著者

Tsuji Kazuhiko
Basic Research Loboratory Semiconductor Research Center Matsuchita Electric Industrial Co. Ltd.
Okada Shozo
Basic Research Loboratory Semiconductor Research Center Matsuchita Electric Industrial Co. Ltd.
KOBUSHI Kazuhiro
Basic Research Loboratory, Semiconductor Research Center, Matsuchita Electric Industrial Co.,Ltd.
KAMEYAMA Shuichi
Basic Research Loboratory, Semiconductor Research Center, Matsuchita Electric Industrial Co.,Ltd.
Kobushi Kazuhiro
Basic Research Loboratory Semiconductor Research Center Matsuchita Electric Industrial Co. Ltd.
Kameyama S
Chiba Univ. Chiba Jpn

著作論文

A High Integrity and Low Resistance Ti-Polycide Gate Using a Nitrogen Ion-Implanted Buffer Layer : Silicon Devices and Process Technologies(Solid State Devices and Materials 1)

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