Yamamoto Kazuma | Department Of Electronic Engineering Faculty Of Engineering Tohoku University:laboratory For Microel
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Department Of Electronic Engineering Faculty Of Engineering Tohoku University:laboratory For Microel | 論文
- Selective Tungsten Chemical Vapor Deposition with High Deposition Rate for ULSI Application
- Silicon Wafer Orientation Dependence of Metal Oxide Sermiconductor Device Reliability
- Breakdown Voltage of CO2 at Temperatures around 4000K and in Range from 300 to 700K