Nakano Koji | Advanced Technology Research Center Mitsubishi Heavy Industries Ltd.
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概要
関連著者
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Nakano Koji
Advanced Research Laboratory Hitachi Ltd.
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Sakamoto Hitoshi
Advanced Technology Research Center Mitsubishi Heavy Industries Ltd.
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Horie Tetsuhiro
Advanced Technology Research Center Mitsubishi Heavy Industries Ltd.
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Nakano Koji
Advanced Technology Research Center Mitsubishi Heavy Industries Ltd.
著作論文
- Low-Temperature Growth of SiO_2 Films by Electron-Induced Ultrahigh Vacuum Chemical Vapor Deposition