Pfeiffer Hans | Ibm Microelectronics Semiconductor Research And Development Center East Fishkill Facility

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概要

• 同名の論文著者
• Ibm Microelectronics Semiconductor Research And Development Center East Fishkill Facilityの論文著者

関連著者

• PFEIFFER Hans

  IBM Microelectronics Division, Semiconductor Research and Development Center

• Pfeiffer Hans

  Ibm Microelectronics Semiconductor Research And Development Center East Fishkill Facility

著作論文

• Projection Reduction Exposure with Variable Axis Immersion Lenses (PREVAIL)-A High Throughput E-Beam Projection Approach for Next Generation Lithography

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