Uenishi Yuji | Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp.
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Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp. | 論文
- OD-04 CHARACTERISTICS AND CONTROL OF MEMS MIRRORS FOR OPTICAL CROSS-CONNECT SWITCH
- A Three-Dimensional Micro-Electro-Mechanical System (MEMS) Optical Switch Module Using Low-Cost Highly Accurate Polymer Components
- MCH-03 Effect of AC drive in control of MEMS mirror tilt angle(Micro/Nanomechatronics II,Technical Program of Oral Presentations)
- Fabrication of Optical Microelectromechanical-System Switches Having Multilevel Mirror-Drive Electrodes
- A New High-Performance Ion Source Based on Magnetically Neutral Loop Discharge