Won Yong | System Ic R & D Center Hynix Semiconductor Inc.
スポンサーリンク
概要
System Ic R & D Center Hynix Semiconductor Inc. | 論文
- Effects of Macroscopic Pattern Density and O_2 Addition on Chamber Stability during Silicon Nitride Layer Etching in UNITY II-IEM Plasma Source
- Effects of Gas Species on Charging Induced Tungsten Plug Corrosion during Post Metal Etch Process