Chiu H. | Institute Of Applied Chemistry National Chiao Tung University
スポンサーリンク
概要
関連著者
-
Chiu H.
Institute Of Applied Chemistry National Chiao Tung University
-
SUN S.
National Nano Device Laboratory National Chiao Tung University
-
Tsai M.
National Nano Device Laboratory And Department Of Electronics Engineering
-
Sun S.
National Nano Device Laboratory And Department Of Electronics Engineering
-
WU T.
National Taiwan University Hospital
-
Yeh W.
National Nano Device Laboratory And Department Of Electronics Engineering
-
Chen M.
National Nano Device Laboratory And Department Of Electronics Engineering
-
Tsai C.
Institute Of Applied Chemistry National Chiao Tung University
-
Chuang S.
Institute Of Applied Chemistry National Chiao Tung University
著作論文
- Comparison of CVD and PVD TaN as Diffusion Barriers for Al and Cu Metallization
- A Comparative Study of CVD and PVD Tungsten Nitride Diffusion Barriers for Cu Metallization