Miyagawa T | Riken Saitama Jpn

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概要

• 同名の論文著者
• Riken Saitama Jpnの論文著者

関連著者

• MIYAGAWA Tsugio

  o Kawasaki Steel Corporation

• Fujinaga Masashi

  O Kawasaki Steel Corporation Technical Research Division:(present Address) Technical Research Divisi

• ONO Hideaki

  2nd Research Group, RIMES, Ltd., c

• YONEMOTO Takaharu

  2nd Research Group, RIMES, Ltd., c

• Ono Hideaki

  2nd Research Group Rimes Ltd. C

• Miyagawa T

  Riken Saitama Jpn

• Yonemoto Takaharu

  2nd Research Group Rimes Ltd. C

著作論文

• Preparation of (Fe/Fe-N)/(Si-O) and (Fe/Fe-N)/(Si-N) Multilayered Films by Sputtering, ECR Plasma Nitridation and ECR Plasma CVD

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