DITIZIO R.A. | Electronic Materials and Processing Research Laboratory, The Pennsylvania State University

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概要

• 同名の論文著者
• Electronic Materials and Processing Research Laboratory, The Pennsylvania State Universityの論文著者

関連著者

• Li Xiaoyu

  Department Of Electronics And Information Science Kyoto Institute Of Technology

• Viswanathan C

  Sematech Tx Usa

• Boden E.

  Sematech Austin

• REMBETSKI John

  SEMATECH Austin

• CHAN Y

  SEMATECH Austin

• GU Tieer

  Electronic Materials and Processing Research Laboratory, The Pennsylvania State University

• AWADELKARIM O.O.

  Electronic Materials and Processing Research Laboratory, The Pennsylvania State University

• DITIZIO R.A.

  Electronic Materials and Processing Research Laboratory, The Pennsylvania State University

• FONASH S.J.

  Electronic Materials and Processing Research Laboratory, The Pennsylvania State University

• VISWANATHAN C.R.

  Department of Electrical Engineering, University of California at Los Angeles

• Fonash S.j.

  Electronic Materials And Processing Research Laboratory The Pennsylvania State University

• Chan Y

  Univ. California Ca Usa

• Gu Tieer

  Electronic Materials And Processing Research Laboratory The Pennsylvania State University

• Awadelkarim O.o.

  Electronic Materials And Processing Research Laboratory The Pennsylvania State University

• Ditizio R.a.

  Electronic Materials And Processing Research Laboratory The Pennsylvania State University

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著作論文

• A Comparison of Cl_2 and HBr/Cl_2-Based Polysilicon Etch Chernistries : Impact on SiO_2 and Si Substrate Damage

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