Lee Eung-jik | Department Of Materials Science And Engineering Kaist

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概要

• 同名の論文著者
• Department Of Materials Science And Engineering Kaistの論文著者

関連著者

• Kim Jin-woong

  Semiconductor R&d Lab.i Hyundai Electronics Co. Ltd.

• Lee Won-jong

  Department Of Computer Science Yonsei University

• Lee Won-jong

  Department Of Materials Science And Engineering Kaist

• Lee Eung-jik

  Department Of Materials Science And Engineering Kaist

著作論文

• Reactive Ion Etching Mechanism of RuO2 Thin Films in Oxygen Plasma with the Addition of CF4, Cl2, and N2

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