河合 晃 | Department of Electrical Engineering, Nagaoka University of Technology
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概要
関連著者
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河合 晃
Department of Electrical Engineering, Nagaoka University of Technology
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Kawai Akira
Department Of Orthopaedic Surgery National Cancer Center Hospital
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Kawai Akira
Department Of Electrical Engineering Nagaoka University Of Technology
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KAWAI AKIRA
Department of Orthopaedic Surgery, Okayama University
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永田 一志
三菱電機株式会社ulsi開発研究所
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永田 一志
三菱電気株式会社ULSI研究所
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河合 晃
三菱電気株式会社ULSI研究所
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Abe Takato
Department Of Electrical Engineering Nagaoka University Of Technology
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Kawai A
Nagaoka Univ. Technol. Niigata Jpn
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阿部 貴人
Department of Electrical Engineering, Nagaoka University of Technology
著作論文
- Al薄膜の表面粗さとレジスト微細パタ-ンの接着性
- Spreading of Water Drop on Geometrical Rough Surface Formed by Photolithography
- Characterization of Fall Angle of Water Drop based on Surface Energy Components
- Adhesion of Micro Window Pattern Formed by Photolithography
- 原子間力顕微鏡を用いた線幅60〜152nmの電子線用レジストパターンの倒壊特性の解析