Toshiyoshi H | Iis. Univ. Of Tokyo
スポンサーリンク
概要
Iis. Univ. Of Tokyo | 論文
- Fabrication of Micromechanical Tunneling Probes and Actuators on a Silicon Chip
- A Digital-to-Analog Converter of Displacement by an Integrated Micromechanism
- (マイクロマシン)
- Fabrication of Silicon-Based Filiform-Necked Nanometric Oscillators
- Contact resistance modeling of MEMS scanner for CMOS-MEMS simultaneous simulation (集積回路)