Ogata Kiyoshi | Nissin Electric Co. Ltd. R&d Laboratories
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概要
Nissin Electric Co. Ltd. R&d Laboratories | 論文
- Effects of Antenna Size and Configurations in Large-Area RF Plasma Production with Internal Low-Inductance Antenna Units
- Electron Injection into Si Nanodot Fabricated by Side-Wall Plasma Enhanced Chemical Vapor Deposition
- Large-Area and High-Speed Deposition of Microcrystalline Silicon Film by Inductive Coupled Plasma using Internal Low-Inductance Antenna