Otaki K | R&d Headquarters Nikon Corporation

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概要

• 同名の論文著者
• R&d Headquarters Nikon Corporationの論文著者

R&d Headquarters Nikon Corporation | 論文

• Polarization Effect on Signal from Optical ROM Using Solid Immersion Lens
• Fabrication of 0.1μm Line-and-Space Patterns using Soft X-Ray Reduction Lithography
• Improvement of the Uniformity of Tungsten / Carborn Multilayers by Thermal Processing
• Normal-Incidence X-Ray Microscope for Carbon Kα Radiation with 0.5 μm Resolution
• Ring-Field Extreme Ultraviolet Exposure System Using Aspherical Mirrors

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