Yamada Kaneta | Atsugi Laboratories Fujitsu Ltd.
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概要
Atsugi Laboratories Fujitsu Ltd. | 論文
- Observation of Low-Temperature Elastic Softening due to Vacancy in Crystalline Silicon(Condensed Matter: Structure, Mechanical and Thermal Properties)
- Enhancement of Boron Diffusion in Silicon by Continuous Wave CO2 Laser Irradiation