Morimoto N | Research And Development Center Sitix Division Sumitomo Metal Industries Limited
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概要
Research And Development Center Sitix Division Sumitomo Metal Industries Limited | 論文
- Slip Length in Silicon Wafers Caused by Indentation during Heat Treatment
- Pinning Effect on Punched-Out Dislocations in Silicon Wafers Investigated Using Indentation Method
- Effect of Rapid Thermal Annealing on Oxygen Precipitation Behavior in Silicon Wafers