NAKATA Rempei | Advanced ULSI Process Engineering Department, Process & Manufacturing Engineering Center, Toshiba Co
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概要
- 同名の論文著者
- Advanced ULSI Process Engineering Department, Process & Manufacturing Engineering Center, Toshiba Coの論文著者
関連著者
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Yoda Tadashi
Department Of Electronic Science And Engineering Kyoto University
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Fujita Keiji
Advanced Ulsi Process Engineering Department Process & Manufacturing Engineering Center Toshiba
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YODA Takashi
Advanced ULSI Process Engineering Department, Process & Manufacturing Engineering Center, Toshiba Co
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MIYAJIMA Hideshi
Advanced ULSI Process Engineering Department, Process & Manufacturing Engineering Center, Toshiba Co
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NAKATA Rempei
Advanced ULSI Process Engineering Department, Process & Manufacturing Engineering Center, Toshiba Co
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HAYASAKA Nobuo
Advanced ULSI Process Engineering Department, Process & Manufacturing Engineering Center, Toshiba Co
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NAKASAKI Yasushi
Corporate, R&D Center, Toshiba Corporation
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Nishiyama Yukio
Advanced Ulsi Process Engineering Department Process & Manufacturing Engineering Center Toshiba
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HASHIMOTO Hideki
Toray Research Center, Inc.
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MIYASHITA Naoto
Advanced ULSI Process Engineering Department, Process & Manufacturing Engineering Center, Toshiba Co
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SHIMADA Miyoko
Advanced ULSI Process Engineering Department, Process & Manufacturing Engineering Center, Toshiba Co
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KAJI Naruhiko
Advanced ULSI Process Engineering Department, Process & Manufacturing Engineering Center, Toshiba Co
著作論文
- Properties of High-Performance Porous SiOC Low-k Film Fabricated Using Electron-Beam Curing
- Structural Studies of High-Performance Low-k Dielectric Materials Improved by Electron-Beam Curing
- High-Performance SiOF Film Fabricated Using a Dual-Frequency-Plasma Chemical Vapor Deposition system