NUMADA Kouji | Department of Electronics and Communication, School of Science and Engineering, Waseda University

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概要

関連著者

KATO Isamu
Department of Electronics, Information and Communication Engineering, Waseda University
Kato Isamu
Department Of Electronics And Communication Engineering School Of Science And Engineering Waseda Uni
Kiyota Yukihiro
Department Of Electronics And Communication School Of Science And Engineering Waseda University
NUMADA Kouji
Department of Electronics and Communication, School of Science and Engineering, Waseda University
Numada Kouji
Department Of Electronics And Communication School Of Science And Engineering Waseda University

著作論文

Oxidation Properties of Silicon Nitride Thin Films Fabricated by Double Tubed Coaxial Line Type Microwave Plasma Chemical Vapor Deposition : Surfaces, Interfaces and Films

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