Oh Jin-Sung | R&D Division, Hynix Semiconductor Inc.
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概要
関連著者
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Oh Jin-sung
R&d Division Hynix Semiconductor Inc.
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Kim J.-w.
Inha University Incheon Korea
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Choi Yong-hee
M-parc School Of Information And Communication Engineering Inha University
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KIM Jin-Woong
R&D Division, Hynix Semiconductor Inc.
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Kim Jin-woong
R&d Division Hynix Semiconductor Inc.
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Song Ho-young
M-parc School Of Information And Communication Engineering Inha University
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Park Se-geun
M-parc School Of Information And Communication Engineering Inha University
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O Beom-hoan
M-parc School Of Information And Communication Engineering Inha University
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Oh Jin-Sung
R&D Division, Hynix Semiconductor Inc.
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Oh J‐s
R&d Division Hynix Semiconductor Inc.
著作論文
- Effect of Time-varying Axial Magnetic Field on High Aspect Ratio SiO_2 Etching in an Inductively Coupled Plasma
- Effect of Time-varying Axial Magnetic Field on High Aspect Ratio SiO_2 Etching in an Inductively Coupled Plasma