Iizumi T | Hitachi High-technologies Corp.
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概要
Hitachi High-technologies Corp. | 論文
- Development of an Enterprise-Wide Yield Management System Using Critical Area Analysis for High-Product-Mix Semiconductor Manufacturing
- A method for multidirectional TEM observation of a specific site at atomic resolution
- Evaluation of TEM samples of an Mg-Al alloy prepared using FIB milling at the operating voltages of 10kV and 40kV
- Application of a FIB-STEM system for 3D observation of a resin-embedded yeast cell
- Estimation of Radiation Damage and Pattern Resolution in Ion Direct Writing Using Scattering of Low Energetic Ions