Mizutani Naoki | Ulvac Japan Ltd.

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概要

• 同名の論文著者
• Ulvac Japan Ltd.の論文著者

関連著者

• SEKINE Makoto

  Association of Super-Advanced Electronics Technologies (ASET)

• Mizutani Naoki

  Ulvac Japan Ltd.

• Hikosaka Yukinobu

  Association of Super-Advanced Electronics Technologies (ASET)

• Endo Mitsuhiro

  Ulvac Japan Ltd.

• HAYASHI Hisataka

  Association of Super-Advanced Electronics Technologies (ASET)

• Hayashi H

  Association Of Super-advanced Electronics Technologies (aset):(present Address)process & Manufac

• Sekine M

  Association Of Super-advanced Electronics Technologies (aset):(present Address)process & Manufac

• Tsuboi Hideo

  ULVAC JAPAN, Ltd.

• Endo Mitsuhiro

  ULVAC JAPAN, Ltd.

• Hikosaka Y

  Association Of Super-advanced Electronics Technologies (aset):(present Address)device Development Di

• Tsuboi Hideo

  Ulvac Japan Ltd.

• Mizutani Naoki

  ULVAC JAPAN, Ltd., 2500 Hagisono, Chigasaki, Kanagawa, 253-8543, Japan

• Hikosaka Yukinobu

  Association of Super-Advanced Electronics Technologies (ASET), 292 Yoshida, Totsuka, Yokohama, 244-0817, Japan

• HisatakaHayashi HisatakaHayashi

  Association of Super-Advanced Electronics Technologies (ASET), 292 Yoshida, Totsuka, Yokohama, 244-0817, Japan

• HideoTsuboi HideoTsuboi

  ULVAC JAPAN, Ltd., 2500 Hagisono, Chigasaki, Kanagawa, 253-8543, Japan

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著作論文

• Realistic Etch Yield of Fluorocarbon ions in SiO_2 Etch Process
• Realistic Etch Yield of Fluorocarbon Ions in SiO2 Etch Process

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