Nomura Yutaka | Research And Development Center Hitachi Chemical Co. Ltd.
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概要
関連著者
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Nomura Yutaka
Research And Development Center Hitachi Chemical Co. Ltd.
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KURINO Hiroyuki
Department of Machine Intelligence and Systems Engineering, Tohoku University
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KOYANAGI Mitsumasa
Department of Machine Intelligence and Systems Engineering, Tohoku University
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Kurino Hiroyuki
Department Of Bioengineering And Robotics Tohoku University
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OTA Fumihiko
Research and Development Center, Hitachi Chemical Co., Ltd.
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Ota Fumihiko
Research And Development Center Hitachi Chemical Co. Ltd.
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Koyanagi Mitsumasa
Department Of Bioengineering And Robotics Graduate School Of Engineering Tohoku University
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Kurino Hiroyuki
Department Of Bioengineering And Robotics Graduate School Of Engineering Tohoku University
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Koyanagi Mitsumasa
Department of Bioengineering and Robotics, Tohoku University, 01 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Nomura Yutaka
Research and Development Center, Hitachi Chemical Co., Ltd., 13-1 Higashi 4-chome, Hitachi, Ibaraki 317-8555, Japan
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Kurino Hiroyuki
Department of Bioengineering and Robotics, Tohoku University, 01 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Ota Fumihiko
Research and Development Center, Hitachi Chemical Co., Ltd., 13-1 Higashi 4-chome, Hitachi, Ibaraki 317-8555, Japan
著作論文
- Fundamental Properties of Organic Low-k Dielectrics Usable in the Cu Damascene Process
- Fundamental Properties of Organic Low-$k$ Dielectrics Usable in the Cu Damascene Process